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2025/07/24 03:01:55 正規表現[{ "ControlJob": { "Keys": { "CtrlJobID": "LP1/CJ160608", "EquipmentID": "EP00(forDIMS)" }, "Attributes": { "FileType": "EquipmentConstant", "JsonSchemaVersion": "3.0", "FileGeneratorSoftwareVersion": "3.5.0.5", "PrimaryRecipeID": "SYSTEM/LPC/SYSRCP_PM1", "RecipeType": "SYSTEM", "Events": { "ControlStateEvents": [ { "PreviousState": "(no state)", "Trigger": "ControlJobStart", "NewState": "EXECUTING", "Actions": null, "DateTime": "2025-07-10T07:06:14.000000Z" } ] }, "EquipmentConstants": [ { "Name": "Eq_ID", "Unit": "", "ECID": "", "Value": "1", "DataType": "String" }, { "Name": "Eq_Name", "Unit": "", "ECID": "", "Value": "EP00(forDIMS)", "DataType": "String" } ] }, "ProcessJobs": [ { "Keys": { "PRJobID": "LP1/PJ 1/160608", "ModuleRecipeID": "Process/P1/PRCRCP_6Steps" }, "Attributes": { "LotID": [ "LOTID1", "LOTID2" ], "Events": { "ControlStateEvents": [ { "PreviousState": "(no state)", "Trigger": "ProcessJobStart", "NewState": "EXECUTING", "Actions": null, "DateTime": "2025-07-10T07:06:29.000000Z" }, { "PreviousState": "(no state)", "Trigger": "ProcessJobEnd", "NewState": "IDLE", "Actions": null, "DateTime": "2025-07-10T07:16:20.000000Z" } ] } }, "ModuleProcessReports": [ { "Keys": { "ModuleID": "TCP3453510" }, "Attributes": { "ModuleRecipeID": "Process/P1/PRCRCP_6Steps", "EquipmentConstants": [ { "Name": "Equipment - Equipment Mode Edit/Process Chamber Type", "Unit": "", "ECID": 1155602, "Value": "Vigus", "DataType": "String" }, { "Name": "Equipment - Equipment Mode Edit/Process Chamber Sub Type", "Unit": "", "ECID": 1155925, "Value": "TYPE-H-C", "DataType": "String" } ] } } ] } ] }}]のjson文法をチェックしました
